Pfeiffer 德國(guó)普發(fā)冷陰極真空計(jì) IKR 系列技術(shù)參數(shù)
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型號(hào)
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接口
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真空計(jì)測(cè)量
范圍 hPa
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工作溫度°C
|
烘烤溫度°C
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真空計(jì)
測(cè)量精度
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極限壓力
hPa
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重量
g
|
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IKR 360 低電流
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DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
|
1X10-9 -10-2
|
5-55
|
150
|
± 30 %
|
10,000
|
280-570
|
|
IKR 360
高電流
|
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
|
1X10-9 -10-2
|
5-55
|
150
|
± 30 %
|
10,000
|
280-570
|
|
IKR 251
|
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-F
|
2X10-9 -10-2
|
5-55
|
150
|
± 30 %
|
10,000
|
700
|
|
IKR 261
|
DN 40 ISO-KF
DN 40 CF-F
long case,
DN 40 CF-F
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2 X10-9 -10-2
|
5-55
|
250
|
± 30 %
|
10,000
|
700
|
|
IKR 270
|
DN 40 CF-F
long case,
DN 40 CF-F
|
5X10-11 -10-2
|
5-55
|
250
|
± 30 %
|
10,000 |
950
|
真空計(jì) IKR 360 低電流：用于中真空和高真空的真空工藝